Introduction TO Optical 3D Surface profilometer
Optical 3D Surface profilometer is an idealinstrument for sub-Nanometer measurement of various precision parts. Based onthe principle of white light interference technology, combined with precisionZ-direction scanning module and 3D modeling algorithm, it contactlessly scansthe surface of the object then establish a 3D image for the surface. A serialof 2D, 3D parameters reflecting surfacequality of the object are obtained after XtremeVision software processes andanalyzes the 3D image.
Optical 3D Surface profilometer is a user-friendly precision opticalinstrument with powerful analysis functions for all kinds of surface form &roughness parameters. With unique light source it could measure variousprecision parts with both smooth and rough surface.
Technical specifications
Light source | Green LED | ||
Video system | 1024×1024(Optional 2048×2048) | ||
Optical lens | 10×、50× ，(Optional 2.5×，5×，20×，100×) | ||
Optical zoom | 1×(Optional 0.5×、0.75×) | ||
Lens holder | 3 holes-manual | ||
XY Object table | Size | 200×200mm | |
Moving range | 100×100mm(Customization is supported) | ||
Loading capacity | 10kg | ||
Control method | Motorized | ||
Tilt | ±4°Manual | ||
Z Axis focusing | Moving range | 100mm | |
Control method | Motorized | ||
Scanning range of Z axis | 2.2mm(bigger range is optional) | ||
Resolution of Z axis | 0.1nm | ||
Max scanning speed | 30µm/s | ||
Stage measurement | Uncertainty | Repeatability | |
0.75% | 0.1% 1σ | ||
Remark: Performance parameters are testedby using a 4.7µm precision master stage gauge in lab according to ISO 4287 andISO 25178.
Zoom ratio of lens | 2.5× | 5× | 10× | 20× | 50× | 100× | ||
Numerical hole diameter | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | ||
Optical resolution @550nm(µm) | 3.7 | 2.1 | 0.92 | 0.69 | 0.5 | 0.4 | ||
Depth of focus(µm) | 48.6 | 16.2 | 3.04 | 1.71 | 0.9 | 0.56 | ||
Working distance(mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 | ||
Field H×V (mm) | Video system 1024×1024 | 0.5× | 3.84×3.84 | 1.92×1.92 | 0.96×0.96 | 0.48×0.48 | 0.192×0.192 | 0.096×0.096 |
0.75× | 2.56×2.56 | 1.28×1.28 | 0.64×0.64 | 0.32×0.32 | 0.128×0.128 | 0.064×0.064 | ||
1× | 1.92×1.92 | 0.96×0.96 | 0.48×0.48 | 0.24×0.24 | 0.096×0.096 | 0.048×0.048 | ||
Video system 2048×2048 | 0.5× | 8.96×8.96 | 4.48×4.48 | 2.24×2.24 | 1.12×1.12 | 0.448×0.448 | 0.224×0.224 | |
0.75× | 6.44×6.44 | 3.22×3.22 | 1.61×1.61 | 0.805×0.805 | 0.322×0.322 | 0.161×0.161 | ||
1× | 4.48×4.48 | 2.24×2.24 | 1.12×1.12 | 0.56×0.56 | 0.224×0.224 | 0.112×0.112 | ||
※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:
2D Parameters
Standard | Parameters | |||
ISO 4287-1997 | Principal section | Roughness | Waviness | |
Amplitude | Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku | Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku | Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku | |
interval | PSm,Pdq | RSm,Rdq | WSm,Wdq | |
Substance | Pmr,Pdc | Rmr,Rdc,Rmr(Rz/4) | Wmr,Wdc,Wmr(Wz/4) | |
Peak | PPc | RPc | WPc | |
ISO 13565 | ISO 13565-2 | Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk | ||
ISO 12085 | Roughness graph | R,AR,R× ,Nr | ||
Waviness graph | W,AW,W×,Wte | |||
Other graph | Rke,Rpke,Rvke | |||
AMSEB46.1 | 2D | Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt | ||
DIN EN ISO 4287-2010 | Original profile | Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr, | ||
Roughness | Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr, | |||
Waviness | Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr | |||
JIS B0601-2013 | Original profile | Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr, | ||
Roughness | Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr | |||
Waviness | Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr | |||
GBT 3505-2009 | Original profile | Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr, | ||
Roughness | Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr | |||
Waviness | Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr | |||
3D Parameters
Standard | Parameters | |
ISO 25178 | Height | Sq,Ssk,Sku,Sp,Sv,Sz,Sa |
function | Smr,Smc,S×p | |
Space | Sal,Str,Std | |
Composite parameters | Sdq,Sdr | |
Volume | Vm,Vv,Vmp,Vmc,Vvc,Vvv | |
Form | Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv | |
Functional | Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq | |
ISO 12781 | Flatness | FLTt,FLTp,FLTv,FLTq |
EUR 15178N | Amplitude | Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St |
Space | Str,Std,Sal | |
Composite parameters | Sdq,Sds,Ssc,Sdr,Sfd | |
Area, Volume | Smr,Sdc | |
Function | Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq | |
Functional | Sbi,Sci,Svi | |
EUR 16145 EN | Amplitude | Sa,Sq,Sy,Sz,Ssk,Sku |
Mixed parameters | Ssc,Sdq,Sdr | |
Functional | Sbi,Sci,Svi,Sk,Spk,Svk | |
Space | Sds,Std,Stdi,Srw,Srwi | |
Hardness | Hs,Hvol,Hv,Hps,Hpvol,Hpv,Hap,Hbp | |
ASME B46.1 | 3D | St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt |
Applications
It is used for measurement and analysis ofsurface roughness and profile of precision components from industries ofsemi-conductor, 3C Electronics, ultraprecise machining, optical machining,micro-nano materials, micro-electro-mechanical system.
Measurement and analysis for variousproducts, components and materials`surface form and profile characteristics,such as flatness, roughness, waviness, appearance, surface defect,abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.
3CElectronics_Sapphire crystal
3CElectronics _ Ink screen
Inaddition to the above applications, there are many applications for the Optical3D Surface Profilometer. Welcome to consult.
